Surface Analysis

Arrive at a confident answer

Tackle the most challenging surface, thin film and interface questions with Thermo Scientific XPS spectrometers. Our analytical innovations allow scientists on the forefront of materials science to drive bold progress in the fields of ultra thin film and nanotechnology development. Unparalleled ease-of-use, best-in-class software and high sample throughput provide superior results for production and analytical laboratories. Whenever new questions rise to the surface, our comprehensive offering of XPS spectrometers deliver the performance and flexibility to arrive at a confident answer.

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Featured XPS system

Offer fully automated multi-technique analysis along with high throughput without sacrificing research grade results with the Thermo Scientific Nexsa XPS System. Integration of multiple analytical techniques like ISS, UPS, REELS and Raman allows users to conduct true correlative analysis, unlocking the potential for further advances in microelectronics, ultra-thin films, nanotechnology development and many other applications.

Nexsa XPS system

Get precise results, quickly and efficiently. The compact Thermo Scientific K-Alpha system bridges the XPS requirements for both research and routine analysis with high sample throughput and advanced capabilities. Intuitive operation, guided by the Thermo Scientific Avantage Data System, makes the K-Alpha XPS ideal for multi-user facilities.


Experience high analytical performance and flexibility with the Thermo Scientific ESCALAB XI+ X-ray Photoelectron Spectrometer (XPS) Microprobe. This system combines high sensitivity with high resolution quantitative imaging and multi-technique capability to produce high-quality survey scans in seconds. 


Characterize ultra-thin layers non-destructively using the Thermo Scientific Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System. Theta Probe collects angle resolved spectra without the need to tilt the sample, making complex thin film measurements simple and intuitive.


Ensure peak performance for your next surface analysis experiment. The Thermo Scientific MAGCIS dual mode ion source enables depth profiling analysis and surface cleaning of both soft and hard materials on the same XPS instrument. Switching between gas cluster sputtering and monatomic sputtering is handled completely by Avantage software, and can be done in a matter of seconds.

HDI - Avantage Data System 230 x 195

Realize the full potential of your electron spectrometer with the Thermo Scientific Avantage Data System for surface analysis. This best-in-class data system integrates instrument control, data acquisition, data processing and reporting to provide precise, accurate and reliable instrument control.

Featured XPS video - MAGCIS from the inside out

This dual-mode ion source enables depth profile analysis and surface cleaning of both soft and hard materials on the same XPS instrument.

Battery compendium

Lithium-Ion Battery Analysis

Achieve next level performance of lithium-ion batteries with this 48 page, multiple technique application note compendium for li-ion batteries.

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